P201：材料與裝備技術

Materials and Equipment Technologies

時間：2016年11月16日下午 14:00~17:30

場地：北京國際會議中心305E

主持人

Moderator

王軍喜/ WANG Junxi

中科院半導體研究所研究員、中科院半導體照明研發中心副主任/Vice Director at R&D Center for Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences

Russell Dupuis

佐治亞理工大學教授/Professor at Georgia Institute of Technology

14:00-14:25

Progress in Bulk GaN Substrate Growth

徐科中國科學院蘇州納米技術與納米仿生研究所納米測試中心研究員，主任

XU Ke     Director of Nano-characterization Lab in Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences

14:25-14:45

High-Quality GaNGrowth on Quasi-Periodic Nano-Mask of carbon nanotubes

于彤軍北京大學教授

YU Tongjun    Professor at Peking University

14:45-15:05

Blue LED Mass Production in a Close Coupled Showerhead MOCVD Tool

Adam R Boyd   Application Engineering CCS高級部門經理，德國愛思強股份有限公司

Adam R Boyd   Senior Department Manager Application Engineering CCS，AIXTRON SE

15:05-15:25

GaN based LED and HEMT Devices Grown on Large Diameter Substrates

李洪偉中微半導體高級工藝工程師

LI Hongwei    Senior Member of Technical Staff at Advanced Micro-Fabrication Equipment Inc.

15:25-15:40

茶歇/Tea Break

15:40-16:00

III-Nitride Nanowire Leds and Lasers: The Next-Generation Lighting Technology

Hieu P T NGUYEN    美國新澤西理工學院電子與計算機工程系助理教授

Hieu P T NGUYEN    Assistant professor in the Department of Electrical and Computer Engineering, New Jersey Institute of Technology, USA

16:00-16:20

SCIL Nanoimprint Solutions: Cost-effective High Volume Nano Structuring of Sapphire Wafers

Rob.J. VOORKAMP    荷蘭飛利浦知識產權與標準部SCIL Nanoimprint Solutions合作創始人

Rob.J. VOORKAMP    Co-founder of SCIL Nanoimprint Solutions, Intellectual Property & Standards, Philips Group Innovation，Netherlands

16:20-16:40

Accelerating Photonics Growth Through Advancements in High Performance As/P MOCVD and Ion Beam Sputtering Technology

Mark Mckee美國維易科精密儀器有限公司市場營銷總監

Mark MckeeMarketing Director at Veeco Instruments Inc., USA

16:40-17:00

Application of Magnetron Sputtering AIN Film in GaN based LED Manufacturing Process

丁培軍北京北方華創微電子裝備有限公司副總裁兼PVD裝備事業部總經理

DING PeijunVice President and General Manager at Equipment Department of Beijing NMC Co.,Ltd.